A novel design and microfabrication were developed for a micro PEM (Proton Exchange Membrane) fuel cell with a cross section of 5cm2 and thickness (for a single cell) of about 690μm (see figure 1). A new design and fabrication processes were developed for both flow field plate and MEA parts (see figure 2 and figure 3). Performance tests of polarization curves and power density distribution were measured (See figure 4). The resultants have been accepted by Microsystem Technologies. Moreover, the innovative design conception and microfabrication processes have been applied for ROC patents.